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Inorganic Chemistry

Working Paper

In0.5Ga0.5N Layers by Atomic Layer Deposition

Polla Rouf, Justinas Palisaitis, Babak Bakhit, Nathan O'Brien, Henrik Pedersen

Version 1 posted 26 May 2021

288

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Inorganic Chemistry

Working Paper

Synthesis, Characterization and Thermal Study of Divalent Germanium, Tin and Lead Triazenides for Atomic Layer Deposition

Rouzbeh Samii, David Zanders, Anton Fransson, Goran Bačić, Sean Barry, Lars Ojamäe, Vadim Kessler, Henrik Pedersen, Nathan O'Brien

Version 1 posted 09 March 2021

354

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Inorganic Chemistry

Working Paper

Deposition Study of Indium Trisguanidinate as a Possible Indium Nitride Precursor

Polla Rouf, Nathan J O'Brien, Sydney C. Buttera, Sean Barry, Henrik Pedersen

Version 1 posted 31 October 2018

507

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Physical Chemistry

Working Paper

Resolving impurities in atomic layer deposited aluminum nitride through low cost, high efficiency precursor design

Sydney Buttera, Polla Rouf, Petro Deminskyi, Nathan O'Brien, Henrik Pedersen, Sean Barry

Version 3 posted 08 December 2020

1,008

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Organometallic Chemistry

Working Paper

The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling ALD of InN Films

Polla Rouf, Nathan J O'Brien, Karl Rönnby, Rouzbeh Samii, Ivan G. Ivanov, Lars Ojamäe, Henrik Pedersen

Version 1 posted 19 June 2019

452

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Inorganic Chemistry

Working Paper

Epitaxial GaN using Ga(NMe2)3 and NH3 Plasma by Atomic Layer Deposition

Polla Rouf, Nathan J O'Brien, Sydney C. Buttera, Ivan Martinovic, Babak Bakhit, Erik Martinsson, Justinas Palisaitis, Chih-Wei Hsu, Henrik Pedersen

Version 2 posted 21 May 2020

778

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Inorganic Chemistry

Working Paper

In-situ Activation of a Highly Volatile and Thermally Stable Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition

Nathan O'Brien, Polla Rouf, Rouzbeh Samii, Karl Rönnby, Sydney C. Buttera, Ivan G. Ivanov, Vadim Kessler, Lars Ojamäe, Henrik Pedersen

Version 1 posted 28 November 2019

571

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Inorganic Chemistry

Working Paper

Synthesis, Structure and Reactivities of Pentacoordinated Phosphorus–Boron Bonded Compounds

Nathan O'Brien, Naokazu Kano, Nizam Havare, Ryohei Uematsu, Romain Ramozzi, Keiji Morokuma

Version 2 posted 04 March 2020

742

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Inorganic Chemistry

Working Paper

Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition

Rouzbeh Samii, David Zanders, Sydney Buttera, Vadim Kessler, Lars Ojamäe, Henrik Pedersen, Nathan O'Brien

Version 1 posted 01 December 2020

360

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Materials Chemistry

Working Paper

Thermal atomic layer deposition of In2O3 thin films using a homoleptic indium triazenide precursor and water

Pamburayi Mpofu, Polla Rouf, Nathan O'Brien, Urban Forsberg, Henrik Pedersen

Version 2 posted 09 February 2022

725

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Refine Search

14 results in Nathan O'Brien in Authors: Nathan O'Brien

In0.5Ga0.5N Layers by Atomic Layer Deposition

Synthesis, Characterization and Thermal Study of Divalent Germanium, Tin and Lead Triazenides for Atomic Layer Deposition

Deposition Study of Indium Trisguanidinate as a Possible Indium Nitride Precursor

Resolving impurities in atomic layer deposited aluminum nitride through low cost, high efficiency precursor design

The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling ALD of InN Films

Epitaxial GaN using Ga(NMe2)3 and NH3 Plasma by Atomic Layer Deposition

In-situ Activation of a Highly Volatile and Thermally Stable Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition

Synthesis, Structure and Reactivities of Pentacoordinated Phosphorus–Boron Bonded Compounds

Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition

Thermal atomic layer deposition of In2O3 thin films using a homoleptic indium triazenide precursor and water

14 results in Authors: Nathan O'Brien