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Materials Chemistry

Working Paper

Thermal atomic layer deposition of In2O3 thin films using a homoleptic indium triazenide precursor and water

Pamburayi Mpofu, Polla Rouf, Nathan O'Brien, Urban Forsberg, Henrik Pedersen

352

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Inorganic Chemistry

Working Paper

Hexacoordinated Gallium(III) Triazenide Precursor for Epitaxial Gallium Nitride by Atomic Layer Deposition

Polla Rouf, Rouzbeh Samii, Karl Rönnby, Babak Bakhit, Sydney Buttera, Ivan Martinovic, Lars Ojamäe, Chih-Wei Hsu, Justinas Palisaitis, Vadim Kessler, Henrik Pedersen, Nathan O'Brien

340

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1

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Inorganic Chemistry

Working Paper

Epitaxial GaN using Ga(NMe2)3 and NH3 Plasma by Atomic Layer Deposition

Polla Rouf, Nathan J O'Brien, Sydney C. Buttera, Ivan Martinovic, Babak Bakhit, Erik Martinsson, Justinas Palisaitis, Chih-Wei Hsu, Henrik Pedersen

628

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Inorganic Chemistry

Working Paper

Synthesis, Structure and Reactivities of Pentacoordinated Phosphorus–Boron Bonded Compounds

Nathan O'Brien, Naokazu Kano, Nizam Havare, Ryohei Uematsu, Romain Ramozzi, Keiji Morokuma

604

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Inorganic Chemistry

Working Paper

Synthesis, Structure and Thermal Properties of Volatile Group 11 Triazenides as Potential Precursors for Vapor Deposition

Rouzbeh Samii, Anton Fransson, David Zanders, Atilla Varga, Sean Barry, Lars Ojamäe, Vadim Kessler, Nathan J. O'Brien

162

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Physical Chemistry

Working Paper

Resolving impurities in atomic layer deposited aluminum nitride through low cost, high efficiency precursor design

Sydney Buttera, Polla Rouf, Petro Deminskyi, Nathan O'Brien, Henrik Pedersen, Sean Barry

669

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Inorganic Chemistry

Working Paper

In0.5Ga0.5N Layers by Atomic Layer Deposition

Polla Rouf, Justinas Palisaitis, Babak Bakhit, Nathan O'Brien, Henrik Pedersen

235

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Organometallic Chemistry

Working Paper

Synthesis, Structure and Thermal Properties of Volatile Indium and Gallium Triazenides

Nathan J. O'Brien, Rouzbeh Samii, Sydney Buttera, Vadim Kessler

117

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Organometallic Chemistry

Working Paper

The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling ALD of InN Films

Polla Rouf, Nathan J O'Brien, Karl Rönnby, Rouzbeh Samii, Ivan G. Ivanov, Lars Ojamäe, Henrik Pedersen

410

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Inorganic Chemistry

Working Paper

Synthesis, Characterization and Thermal Study of Divalent Germanium, Tin and Lead Triazenides for Atomic Layer Deposition

Rouzbeh Samii, David Zanders, Anton Fransson, Goran Bačić, Sean Barry, Lars Ojamäe, Vadim Kessler, Henrik Pedersen, Nathan O'Brien

255

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13 results in Nathan O'Brien in Authors: Nathan O'Brien

Thermal atomic layer deposition of In2O3 thin films using a homoleptic indium triazenide precursor and water

Hexacoordinated Gallium(III) Triazenide Precursor for Epitaxial Gallium Nitride by Atomic Layer Deposition

Epitaxial GaN using Ga(NMe2)3 and NH3 Plasma by Atomic Layer Deposition

Synthesis, Structure and Reactivities of Pentacoordinated Phosphorus–Boron Bonded Compounds

Synthesis, Structure and Thermal Properties of Volatile Group 11 Triazenides as Potential Precursors for Vapor Deposition

Resolving impurities in atomic layer deposited aluminum nitride through low cost, high efficiency precursor design

In0.5Ga0.5N Layers by Atomic Layer Deposition

Synthesis, Structure and Thermal Properties of Volatile Indium and Gallium Triazenides

The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling ALD of InN Films

Synthesis, Characterization and Thermal Study of Divalent Germanium, Tin and Lead Triazenides for Atomic Layer Deposition

13 results in Authors: Nathan O'Brien