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Epitaxial GaN using Ga(NMe2)3 and NH3 Plasma by Atomic Layer Deposition

Polla Rouf, Nathan J O'Brien, Sydney C. Buttera, Ivan Martinovic, Babak Bakhit, Erik Martinsson, Justinas Palisaitis, Chih-Wei Hsu, Henrik Pedersen

Version 2 posted 21 May 2020

679

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Inorganic Chemistry

Working Paper

In-situ Activation of a Highly Volatile and Thermally Stable Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition

Nathan O'Brien, Polla Rouf, Rouzbeh Samii, Karl Rönnby, Sydney C. Buttera, Ivan G. Ivanov, Vadim Kessler, Lars Ojamäe, Henrik Pedersen

Version 1 posted 28 November 2019

516

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Inorganic Chemistry

Working Paper

Methylamines as Nitrogen Precursors in Chemical Vapor Deposition of Gallium Nitride

Karl Rönnby, Sydney C. Buttera, Polla Rouf, Sean Barry, Lars Ojamäe, Henrik Pedersen

Version 3 posted 21 January 2019

1,216

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Inorganic Chemistry

Working Paper

Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition

Rouzbeh Samii, David Zanders, Sydney Buttera, Vadim Kessler, Lars Ojamäe, Henrik Pedersen, Nathan O'Brien

Version 1 posted 01 December 2020

312

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Inorganic Chemistry

Working Paper

Hexacoordinated Gallium(III) Triazenide Precursor for Epitaxial Gallium Nitride by Atomic Layer Deposition

Polla Rouf, Rouzbeh Samii, Karl Rönnby, Babak Bakhit, Sydney Buttera, Ivan Martinovic, Lars Ojamäe, Chih-Wei Hsu, Justinas Palisaitis, Vadim Kessler, Henrik Pedersen, Nathan O'Brien

Version 1 posted 05 November 2020

392

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1

Citations

Physical Chemistry

Working Paper

Resolving impurities in atomic layer deposited aluminum nitride through low cost, high efficiency precursor design

Sydney Buttera, Polla Rouf, Petro Deminskyi, Nathan O'Brien, Henrik Pedersen, Sean Barry

Version 3 posted 08 December 2020

774

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Organometallic Chemistry

Working Paper

Synthesis, Structure and Thermal Properties of Volatile Indium and Gallium Triazenides

Nathan J. O'Brien, Rouzbeh Samii, Sydney Buttera, Vadim Kessler

Version 1 posted 16 March 2022

144

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Inorganic Chemistry

Working Paper

Deposition Study of Indium Trisguanidinate as a Possible Indium Nitride Precursor

Polla Rouf, Nathan J O'Brien, Sydney C. Buttera, Sean Barry, Henrik Pedersen

Version 1 posted 31 October 2018

448

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8 results in Sydney Buttera in Authors: Sydney Buttera

Epitaxial GaN using Ga(NMe2)3 and NH3 Plasma by Atomic Layer Deposition

In-situ Activation of a Highly Volatile and Thermally Stable Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition

Methylamines as Nitrogen Precursors in Chemical Vapor Deposition of Gallium Nitride

Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition

Hexacoordinated Gallium(III) Triazenide Precursor for Epitaxial Gallium Nitride by Atomic Layer Deposition

Resolving impurities in atomic layer deposited aluminum nitride through low cost, high efficiency precursor design

Synthesis, Structure and Thermal Properties of Volatile Indium and Gallium Triazenides

Deposition Study of Indium Trisguanidinate as a Possible Indium Nitride Precursor

8 results in Authors: Sydney Buttera