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Physical Chemistry

Working Paper

Conformality of atomic layer deposition in microchannels: impact of process parameters on the simulated thickness profile

Jihong Yim, Emma Verkama, Jorge Velasco, Karsten Arts, Riikka Puurunen

Version 3 posted 07 March 2022

421

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Inorganic Chemistry

Working Paper

The Importance of Decarbonylation Mechanisms in the Atomic Layer Deposition of High-Quality Ru Films by Zero-Oxidation State Ru(DMBD)(CO)3

Joel Schneider, Camila de Paula, Jacqueline Lewis, Jacob Woodruff, James Raiford, Stacey Bent

Version 1 posted 14 September 2021

610

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Energy

Working Paper

Monolithic two-terminal tandem solar cells using Sb2S3 and solution-processed PbS quantum dots achieving an open-circuit potential beyond 1.1 V

Selina Kern, Gyusang Yi, Pascal Büttner, Florian Scheler, Minh-Hoa Tran, Sofia Korenko, Katharina E. Dehm, Ivan Kundrata, Steve Albrecht, Julien Bachmann, Ryan W. Crisp

Version 1 posted 12 May 2023

285

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1

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Organometallic Chemistry

Working Paper

Synthesis, Structure and Thermal Properties of Volatile Indium and Gallium Triazenides

Nathan J. O'Brien, Rouzbeh Samii, Sydney Buttera, Vadim Kessler

Version 1 posted 16 March 2022

144

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Inorganic Chemistry

Working Paper

SnO2 -SiO2 1D Core-Shell Nanowires Heterostructures for Selective Hydrogen Sensing

Muhammad Hamid Raza, Navpreet Kaur, Elisabetta Comini, Nicola Pinna

Version 1 posted 19 April 2021

377

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Materials Science

Working Paper

Direct Epitaxial Nanometer-Thin InN of High Structural Quality on 4H-SiC by Atomic Layer Deposition

Chih-Wei Hsu, Petro Deminskyi, Ivan Martinovic, Ivan G. Ivanov, Justinas Palisaitis, Henrik Pedersen

Version 2 posted 13 July 2020

477

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Inorganic Chemistry

Working Paper

Role of anionic backbone in NHC-stabilized coinage metal complexes: New precursors for atomic layer deposition

Nils Boysen, Anish Philip, Detlef Rogalla, Maarit Karppinen, Anjana Devi

Version 2 posted 21 October 2021

340

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Inorganic Chemistry

Working Paper

Thermal Ranges and Figures of Merit for Gold-Containing Precursors For ALD

Matthew Griffiths, Zachary Dubrawski, Peter Gordon, Marcel Junige, Sean Barry

Version 1 posted 13 October 2020

325

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Chemical Engineering and Industrial Chemistry

Working Paper

Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels

Jihong Yim, Oili Ylivaara, Markku Ylilammi, Virpi Korpelainen, Eero Haimi, Emma Verkama, Mikko Utriainen, Riikka Puurunen

Version 4 posted 23 September 2020

1,280

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Inorganic Chemistry

Working Paper

Ligand Assisted Volatilization and Thermal Stability of [(t-BuN=)2MoCl2]2

Michael Land, Katherine Roberston, Sean Barry

Version 1 posted 09 August 2019

1,025

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42 results in atomic layer deposition in Keywords: atomic layer deposition

Conformality of atomic layer deposition in microchannels: impact of process parameters on the simulated thickness profile

The Importance of Decarbonylation Mechanisms in the Atomic Layer Deposition of High-Quality Ru Films by Zero-Oxidation State Ru(DMBD)(CO)3

Monolithic two-terminal tandem solar cells using Sb2S3 and solution-processed PbS quantum dots achieving an open-circuit potential beyond 1.1 V

Synthesis, Structure and Thermal Properties of Volatile Indium and Gallium Triazenides

SnO2 -SiO2 1D Core-Shell Nanowires Heterostructures for Selective Hydrogen Sensing

Direct Epitaxial Nanometer-Thin InN of High Structural Quality on 4H-SiC by Atomic Layer Deposition

Role of anionic backbone in NHC-stabilized coinage metal complexes: New precursors for atomic layer deposition

Thermal Ranges and Figures of Merit for Gold-Containing Precursors For ALD

Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels

Ligand Assisted Volatilization and Thermal Stability of [(t-BuN=)2MoCl2]2

42 results in Keywords: atomic layer deposition