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Physical Chemistry

Working Paper

On the limitations of thermal atomic layer deposition of InN using ammonia

Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 06 December 2022

170

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Materials Science

Working Paper

Fabrication of Semi-Transparent SrTaO2N Photoanodes with a GaN Underlayer Grown via Atomic Layer Deposition

Can Lu, Nathan O´Brien, Polla Rouf, Richard Dronskowski, Henrik Pedersen, Adam Slabon

Version 1 posted 12 October 2021

296

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Physical Chemistry

Working Paper

Conformality of atomic layer deposition in microchannels: impact of process parameters on the simulated thickness profile

Jihong Yim, Emma Verkama, Jorge Velasco, Karsten Arts, Riikka Puurunen

Version 3 posted 07 March 2022

479

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Theoretical and Computational Chemistry

Working Paper

Thermal Decomposition of Trimethylindium and Indium Trisguanidinate Precursors for InN Growth: An Ab-Initio and Kinetic Modelling Study

Giane Damas, Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 28 February 2023

239

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Materials Science

Working Paper

Aluminum Dihydride Complexes and their Unexpected Application in Atomic Layer Deposition of Titanium Carbonitride Films

Kyle J. Blakeney, Philip D. Martin, Charles H. Winter

Version 1 posted 03 May 2018

638

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Materials Science

Working Paper

Direct Epitaxial Nanometer-Thin InN of High Structural Quality on 4H-SiC by Atomic Layer Deposition

Chih-Wei Hsu, Petro Deminskyi, Ivan Martinovic, Ivan G. Ivanov, Justinas Palisaitis, Henrik Pedersen

Version 2 posted 13 July 2020

521

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Catalysis

Working Paper

Operation of Amorphous TiO2 Protected Photocathodes Described with the Maxwell Equivalent Circuit

Erin Service, Thomas Moehl, David Tilley

Version 1 posted 10 May 2024

127

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Inorganic Chemistry

Working Paper

Supramolecular Organization and Evaporation of Polymeric Tin Trifluoroacetates

Goran Bacic, Conor D. Rankine, Jason D. Masuda, Derek A. Wann, Sean Barry

Version 1 posted 15 January 2019

1,027

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Inorganic Chemistry

Working Paper

The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe2O3 Using tert-Butylferrocene and O3

Joel Schneider, Jon Baker, Stacey Bent

Version 1 posted 27 November 2019

468

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Inorganic Chemistry

Working Paper

Epitaxial GaN using Ga(NMe2)3 and NH3 Plasma by Atomic Layer Deposition

Polla Rouf, Nathan J O'Brien, Sydney C. Buttera, Ivan Martinovic, Babak Bakhit, Erik Martinsson, Justinas Palisaitis, Chih-Wei Hsu, Henrik Pedersen

Version 2 posted 21 May 2020

723

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Refine Search

43 results in atomic layer deposition in Keywords: atomic layer deposition

On the limitations of thermal atomic layer deposition of InN using ammonia

Fabrication of Semi-Transparent SrTaO2N Photoanodes with a GaN Underlayer Grown via Atomic Layer Deposition

Conformality of atomic layer deposition in microchannels: impact of process parameters on the simulated thickness profile

Thermal Decomposition of Trimethylindium and Indium Trisguanidinate Precursors for InN Growth: An Ab-Initio and Kinetic Modelling Study

Aluminum Dihydride Complexes and their Unexpected Application in Atomic Layer Deposition of Titanium Carbonitride Films

Direct Epitaxial Nanometer-Thin InN of High Structural Quality on 4H-SiC by Atomic Layer Deposition

Operation of Amorphous TiO2 Protected Photocathodes Described with the Maxwell Equivalent Circuit

Supramolecular Organization and Evaporation of Polymeric Tin Trifluoroacetates

The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe2O3 Using tert-Butylferrocene and O3

Epitaxial GaN using Ga(NMe2)3 and NH3 Plasma by Atomic Layer Deposition

43 results in Keywords: atomic layer deposition