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Materials Science

Working Paper

Direct Epitaxial Nanometer-Thin InN of High Structural Quality on 4H-SiC by Atomic Layer Deposition

Chih-Wei Hsu, Petro Deminskyi, Ivan Martinovic, Ivan G. Ivanov, Justinas Palisaitis, Henrik Pedersen

Version 2 posted 13 July 2020

521

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Materials Chemistry

Working Paper

Understanding and Utilizing Reactive Oxygen Reservoirs in Atomic Layer Deposition of Metal Oxides with Ozone

Joel Schneider, Camila de Paula, Nathaniel Richey, Jon Baker, Solomon Oyakhire, Stacey Bent

Version 1 posted 14 March 2022

394

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Catalysis

Working Paper

Operation of Amorphous TiO2 Protected Photocathodes Described with the Maxwell Equivalent Circuit

Erin Service, Thomas Moehl, David Tilley

Version 1 posted 10 May 2024

127

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Inorganic Chemistry

Working Paper

Characterizing Catalyst Function and Transformations in the Plasma Reduction of CO 2 on Atomic Layer Deposition-Synthesized Catalysts

Samuel K. Conlin, Hamed Mehrabi, David N. Parette, Eva N. Nichols, Robert H. Coridan

Version 1 posted 05 January 2024

168

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Organometallic Chemistry

Working Paper

Mechanistic study of the atomic layer deposition of cobalt: A combined mass spectrometric and computational approach

Sofia Donnecke, Mathias Paul, Serena Chan, Veronica Tse, Jigyasa Sachdeva, Peter J. H. Williams, Allen G. Oliver, Irina Paci, J. Scott McIndoe

Version 4 posted 16 October 2023

665

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Chemical Engineering and Industrial Chemistry

Working Paper

Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels

Jihong Yim, Oili Ylivaara, Markku Ylilammi, Virpi Korpelainen, Eero Haimi, Emma Verkama, Mikko Utriainen, Riikka Puurunen

Version 4 posted 23 September 2020

1,368

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Inorganic Chemistry

Working Paper

Supramolecular Organization and Evaporation of Polymeric Tin Trifluoroacetates

Goran Bacic, Conor D. Rankine, Jason D. Masuda, Derek A. Wann, Sean Barry

Version 1 posted 15 January 2019

1,027

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Inorganic Chemistry

Working Paper

Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition

Rouzbeh Samii, David Zanders, Sydney Buttera, Vadim Kessler, Lars Ojamäe, Henrik Pedersen, Nathan O'Brien

Version 1 posted 01 December 2020

327

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Materials Science

Working Paper

Workfunction of Al-Doped ZnO Films Deposited by Atomic Layer Deposition

Peter George Gordon, Goran Bacic, Gregory P. Lopinski, Sean Thomas Barry

Version 1 posted 05 February 2018

1,264

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2

Citations

Inorganic Chemistry

Working Paper

Ligand Assisted Volatilization and Thermal Stability of [(t-BuN=)2MoCl2]2

Michael Land, Katherine Roberston, Sean Barry

Version 1 posted 09 August 2019

1,097

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43 results in Atomic layer deposition in Keywords: Atomic layer deposition

Direct Epitaxial Nanometer-Thin InN of High Structural Quality on 4H-SiC by Atomic Layer Deposition

Understanding and Utilizing Reactive Oxygen Reservoirs in Atomic Layer Deposition of Metal Oxides with Ozone

Operation of Amorphous TiO2 Protected Photocathodes Described with the Maxwell Equivalent Circuit

Characterizing Catalyst Function and Transformations in the Plasma Reduction of CO 2 on Atomic Layer Deposition-Synthesized Catalysts

Mechanistic study of the atomic layer deposition of cobalt: A combined mass spectrometric and computational approach

Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels

Supramolecular Organization and Evaporation of Polymeric Tin Trifluoroacetates

Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition

Workfunction of Al-Doped ZnO Films Deposited by Atomic Layer Deposition

Ligand Assisted Volatilization and Thermal Stability of [(t-BuN=)2MoCl2]2

43 results in Keywords: Atomic layer deposition