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Materials Chemistry

Working Paper

Surface chemistry in atomic layer deposition of AlN thin films from Al(CH3)3 and NH3 studied by mass spectrometry

Pamburayi Mpofu, Houyem Hafdi, Pentti Niiranen, Jonas Lauridsen, Oscar Alm, Tommy Larsson, Henrik Pedersen

Version 1 posted 09 May 2024

364

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Physical Chemistry

Working Paper

Using a heavy inert diffusion additive for superconformal atomic layer deposition

Arun Haridas Choolakkal, Pamburayi Mpofu, Pentti Niiranen, Jens Birch, Henrik Pedersen

Version 1 posted 13 December 2024

133

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Physical Chemistry

Working Paper

Biased quartz crystal microbalance method for studies of CVD surface chemistry induced by plasma electrons

Pentti Niiranen, Hama Nadhom, Michal Zanaska, Robert Boyd, Mauricio Sortica, Daniel Primetzhofer, Daniel Lundin, Henrik Pedersen

Version 1 posted 25 August 2022

229

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Physical Chemistry

Working Paper

Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition

Arun Haridas Choolakkal, Pentti Niiranen, Samira Dorri, Jens Birch, Henrik Pedersen

Version 3 posted 05 September 2024

427

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Materials Chemistry

Working Paper

Plasma Decomposition of Ferrocene

Pentti Niiranen, Felicia Andersson, Daniel Lundin, Lars Ojamäe, Henrik Pedersen

Version 2 posted 29 November 2024

216

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Materials Chemistry

Working Paper

Atomic Layer Deposition of AlxTi1-xN via Co-evaporation of Metal Precursors

Pamburayi Mpofu, Pentti Niiranen, Oscar Alm, Jonas Lauridsen, Tommy Larsson, Henrik Pedersen

Version 2 posted 27 January 2025

169

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Materials Science

Working Paper

Self-limiting deposition of copper from copper beta-diketonates and plasma electrons

Premrudee Promdet, Pentti Niiranen, Simon Lagerkvist, Daniel Lundin, Henrik Pedersen

Version 2 posted 24 March 2025

104

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7 results in Pentti Niiranen in Authors: Pentti Niiranen

Surface chemistry in atomic layer deposition of AlN thin films from Al(CH3)3 and NH3 studied by mass spectrometry

Using a heavy inert diffusion additive for superconformal atomic layer deposition

Biased quartz crystal microbalance method for studies of CVD surface chemistry induced by plasma electrons

Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition

Plasma Decomposition of Ferrocene

Atomic Layer Deposition of AlxTi1-xN via Co-evaporation of Metal Precursors

Self-limiting deposition of copper from copper beta-diketonates and plasma electrons

7 results in Authors: Pentti Niiranen