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4 results in Authors: Pentti Niiranen

Materials Chemistry

Surface chemistry in atomic layer deposition of AlN thin films from Al(CH3)3 and NH3 studied by mass spectrometry

Pamburayi Mpofu, Houyem Hafdi, Pentti Niiranen, Jonas Lauridsen, Oscar Alm, Tommy Larsson, Henrik Pedersen

Version 1 posted 09 May 2024

252

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Physical Chemistry

Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition

Arun Haridas Choolakkal, Pentti Niiranen, Samira Dorri, Jens Birch, Henrik Pedersen

Version 3 posted 05 September 2024

309

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Physical Chemistry

Biased quartz crystal microbalance method for studies of CVD surface chemistry induced by plasma electrons

Pentti Niiranen, Hama Nadhom, Michal Zanaska, Robert Boyd, Mauricio Sortica, Daniel Primetzhofer, Daniel Lundin, Henrik Pedersen

Version 1 posted 25 August 2022

194

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Materials Chemistry

Plasma Decomposition of Ferrocene

Pentti Niiranen, Felicia Andersson, Daniel Lundin, Lars Ojamäe, Henrik Pedersen

Version 1 posted 10 October 2024

103

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