Search

Physical Chemistry

Working Paper

A Systematic Method for Predictive in-silico Chemical Vapour Deposition

Örjan Danielsson, Matts Karlsson, Pitsiri Sukkaew, Henrik Pedersen, Lars Ojamäe

Version 2 posted 12 February 2020

781

Downloads

Inorganic Chemistry

Working Paper

Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition

Rouzbeh Samii, David Zanders, Sydney Buttera, Vadim Kessler, Lars Ojamäe, Henrik Pedersen, Nathan O'Brien

Version 1 posted 01 December 2020

327

Downloads

Inorganic Chemistry

Working Paper

Methylamines as Nitrogen Precursors in Chemical Vapor Deposition of Gallium Nitride

Karl Rönnby, Sydney C. Buttera, Polla Rouf, Sean Barry, Lars Ojamäe, Henrik Pedersen

Version 3 posted 21 January 2019

1,242

Downloads

Inorganic Chemistry

Working Paper

Synthesis, Characterization and Thermal Study of Divalent Germanium, Tin and Lead Triazenides for Atomic Layer Deposition

Rouzbeh Samii, David Zanders, Anton Fransson, Goran Bačić, Sean Barry, Lars Ojamäe, Vadim Kessler, Henrik Pedersen, Nathan O'Brien

Version 1 posted 09 March 2021

323

Downloads

Inorganic Chemistry

Working Paper

In-situ Activation of a Highly Volatile and Thermally Stable Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition

Nathan O'Brien, Polla Rouf, Rouzbeh Samii, Karl Rönnby, Sydney C. Buttera, Ivan G. Ivanov, Vadim Kessler, Lars Ojamäe, Henrik Pedersen

Version 1 posted 28 November 2019

541

Downloads

Organometallic Chemistry

Working Paper

The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling ALD of InN Films

Polla Rouf, Nathan J O'Brien, Karl Rönnby, Rouzbeh Samii, Ivan G. Ivanov, Lars Ojamäe, Henrik Pedersen

Version 1 posted 19 June 2019

437

Downloads

Theoretical and Computational Chemistry

Working Paper

Thermal Decomposition of Trimethylindium and Indium Trisguanidinate Precursors for InN Growth: An Ab-Initio and Kinetic Modelling Study

Giane Damas, Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 28 February 2023

239

Downloads

Inorganic Chemistry

Working Paper

Reduction of carbon impurities in aluminium nitride from time-resolved chemical vapour deposition using trimethylaluminum

Polla Rouf, Pitsiri Sukkaew, Lars Ojamäe, Henrik Pedersen

Version 2 posted 11 May 2020

634

Downloads

Physical Chemistry

Working Paper

Surface structures from NH3 chemisorption in CVD and ALD of AlN, GaN and InN films

Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 24 January 2022

250

Downloads

Physical Chemistry

Working Paper

On the limitations of thermal atomic layer deposition of InN using ammonia

Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 06 December 2022

170

Downloads

Refine Search

15 results in Lars Ojamäe in Authors: Lars Ojamäe

A Systematic Method for Predictive in-silico Chemical Vapour Deposition

Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition

Methylamines as Nitrogen Precursors in Chemical Vapor Deposition of Gallium Nitride

Synthesis, Characterization and Thermal Study of Divalent Germanium, Tin and Lead Triazenides for Atomic Layer Deposition

In-situ Activation of a Highly Volatile and Thermally Stable Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition

The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling ALD of InN Films

Thermal Decomposition of Trimethylindium and Indium Trisguanidinate Precursors for InN Growth: An Ab-Initio and Kinetic Modelling Study

Reduction of carbon impurities in aluminium nitride from time-resolved chemical vapour deposition using trimethylaluminum

Surface structures from NH3 chemisorption in CVD and ALD of AlN, GaN and InN films

On the limitations of thermal atomic layer deposition of InN using ammonia

15 results in Authors: Lars Ojamäe