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thermal scanning probe lithography

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2 results in Keywords: thermal scanning probe lithography

Deterministic grayscale nanotopography to engineer mobilities in strained MoS2 FETs

Xia Liu, Berke Erbas, Ana Conde-Rubio, Norma Rivano, Zhenyu Wang, Jin Jang, Siiri Bienz, Naresh Kumar, Thibault Sohier, Marcos Penedo, Mitali Banerjee, Georg Fantner, Renato Zenobi, Nicola Marzari, Andras Kis, Giovanni Boero, Juergen Brugger

Version 1 posted 20 March 2024

300

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Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification

Berke Erbas, Ana Conde-Rubio, Xia Liu, Joffrey Pernollet, Zenyu Wang, Arnaud Bertsch, Marcos Penedo, Georg Fantner, Mitali Banerjee, Andras Kis, Giovanni Boero, Juergen Brugger

Version 1 posted 12 July 2023

456

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