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Inorganic Chemistry

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Materials Science

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Physical Chemistry

(1)

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Working Paper

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Over 3 years

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Keywords

atomic layer deposition (ALD)

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2 results in Keywords: atomic layer deposition (ALD)

Inorganic Chemistry

Deposition Study of Indium Trisguanidinate as a Possible Indium Nitride Precursor

Polla Rouf, Nathan J O'Brien, Sydney C. Buttera, Sean Barry, Henrik Pedersen

Version 1 posted 31 October 2018

453

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Materials Science

Atomic Layer Deposition of InN Using Trimethylindium and Ammonia Plasma

Petro Deminskyi, Polla Rouf, Ivan G. Ivanov, Henrik Pedersen

Version 3 posted 28 January 2019

1,284

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