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Hexacoordinated Gallium(III) Triazenide Precursor for Epitaxial Gallium Nitride by Atomic Layer Deposition

Polla Rouf, Rouzbeh Samii, Karl Rönnby, Babak Bakhit, Sydney Buttera, Ivan Martinovic, Lars Ojamäe, Chih-Wei Hsu, Justinas Palisaitis, Vadim Kessler, Henrik Pedersen, Nathan O'Brien

Version 1 posted 05 November 2020

448

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1

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Physical Chemistry

Working Paper

Surface structures from NH3 chemisorption in CVD and ALD of AlN, GaN and InN films

Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 24 January 2022

247

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Organometallic Chemistry

Working Paper

The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling ALD of InN Films

Polla Rouf, Nathan J O'Brien, Karl Rönnby, Rouzbeh Samii, Ivan G. Ivanov, Lars Ojamäe, Henrik Pedersen

Version 1 posted 19 June 2019

437

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Physical Chemistry

Working Paper

Kinetic Modeling of Ammonia Decomposition at CVD Conditions

Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 03 June 2020

1,196

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Inorganic Chemistry

Working Paper

In-situ Activation of a Highly Volatile and Thermally Stable Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition

Nathan O'Brien, Polla Rouf, Rouzbeh Samii, Karl Rönnby, Sydney C. Buttera, Ivan G. Ivanov, Vadim Kessler, Lars Ojamäe, Henrik Pedersen

Version 1 posted 28 November 2019

539

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Theoretical and Computational Chemistry

Working Paper

Thermal Decomposition of Trimethylindium and Indium Trisguanidinate Precursors for InN Growth: An Ab-Initio and Kinetic Modelling Study

Giane Damas, Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 28 February 2023

238

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Physical Chemistry

Working Paper

On the limitations of thermal atomic layer deposition of InN using ammonia

Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 06 December 2022

168

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Inorganic Chemistry

Working Paper

Methylamines as Nitrogen Precursors in Chemical Vapor Deposition of Gallium Nitride

Karl Rönnby, Sydney C. Buttera, Polla Rouf, Sean Barry, Lars Ojamäe, Henrik Pedersen

Version 3 posted 21 January 2019

1,240

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Materials Chemistry

Working Paper

On the differences in trimethylaluminum infiltration into PMMA and PLA polymers for sequential infiltration synthesis: insights from experiment and first principles simulations

Michele Perego, Alessia Motta, Karl Ronnby, Forest Tung Jie Yap, Gabriele Seguini, Claudia Wiemer, Michael Nolan

Version 1 posted 04 November 2024

20

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9 results in Karl Ronnby in Authors: Karl Ronnby

Hexacoordinated Gallium(III) Triazenide Precursor for Epitaxial Gallium Nitride by Atomic Layer Deposition

Surface structures from NH3 chemisorption in CVD and ALD of AlN, GaN and InN films

The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling ALD of InN Films

Kinetic Modeling of Ammonia Decomposition at CVD Conditions

In-situ Activation of a Highly Volatile and Thermally Stable Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition

Thermal Decomposition of Trimethylindium and Indium Trisguanidinate Precursors for InN Growth: An Ab-Initio and Kinetic Modelling Study

On the limitations of thermal atomic layer deposition of InN using ammonia

Methylamines as Nitrogen Precursors in Chemical Vapor Deposition of Gallium Nitride

On the differences in trimethylaluminum infiltration into PMMA and PLA polymers for sequential infiltration synthesis: insights from experiment and first principles simulations

9 results in Authors: Karl Ronnby