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Chih-Wei Hsu

5 results in Authors: Chih-Wei Hsu

Inorganic Chemistry

Epitaxial GaN using Ga(NMe2)3 and NH3 Plasma by Atomic Layer Deposition

Polla Rouf, Nathan J O'Brien, Sydney C. Buttera, Ivan Martinovic, Babak Bakhit, Erik Martinsson, Justinas Palisaitis, Chih-Wei Hsu, Henrik Pedersen

Version 2 posted 21 May 2020

679

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Inorganic Chemistry

Hexacoordinated Gallium(III) Triazenide Precursor for Epitaxial Gallium Nitride by Atomic Layer Deposition

Polla Rouf, Rouzbeh Samii, Karl Rönnby, Babak Bakhit, Sydney Buttera, Ivan Martinovic, Lars Ojamäe, Chih-Wei Hsu, Justinas Palisaitis, Vadim Kessler, Henrik Pedersen, Nathan O'Brien

Version 1 posted 05 November 2020

392

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1

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Materials Science

Direct Epitaxial Nanometer-Thin InN of High Structural Quality on 4H-SiC by Atomic Layer Deposition

Chih-Wei Hsu, Petro Deminskyi, Ivan Martinovic, Ivan G. Ivanov, Justinas Palisaitis, Henrik Pedersen

Version 2 posted 13 July 2020

477

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Physical Chemistry

Surface Ligand Removal in Atomic Layer Deposition of GaN Using Triethylgallium

Petro Deminskyi, Chih-Wei Hsu, Babak Bakhit, Polla Rouf, Henrik Pedersen

Version 1 posted 03 November 2020

288

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Materials Chemistry

On the dynamics in chemical vapor deposition of InN

Chih-Wei Hsu, Petro Deminskyi, Anton Persson, Matts Karlsson, Henrik Pedersen

Version 2 posted 25 August 2021

228

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