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Camila de Paula

3 results in Authors: Camila de Paula

Materials Chemistry

Understanding and Utilizing Reactive Oxygen Reservoirs in Atomic Layer Deposition of Metal Oxides with Ozone

Joel Schneider, Camila de Paula, Nathaniel Richey, Jon Baker, Solomon Oyakhire, Stacey Bent

Version 1 posted 14 March 2022

491

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Inorganic Chemistry

The Importance of Decarbonylation Mechanisms in the Atomic Layer Deposition of High-Quality Ru Films by Zero-Oxidation State Ru(DMBD)(CO)3

Joel Schneider, Camila de Paula, Jacqueline Lewis, Jacob Woodruff, James Raiford, Stacey Bent

Version 1 posted 14 September 2021

741

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Inorganic Chemistry

Mechanistic Study of Nucleation Enhancement in Atomic Layer Deposition by Pre-Treatment with Small Organometallic Molecules

Camila de Paula, Nathaniel Richey, Li Zeng, Stacey Bent

Version 2 posted 11 September 2019

1,597

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1

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