Chemical vapor deposition of sp2-boron nitride films on Al2O3 (0001), (11𝟐0), (1𝟏02) and (10𝟏0) substrates

07 December 2021, Version 1
This content is a preprint and has not undergone peer review at the time of posting.


Thin films of boron nitride in its sp2-hybridized form (sp2-BN) have potential use in UV-devices and dielectrics. Here, we explore chemical vapor deposition (CVD) of sp2-BN on various cuts of sapphire; Al2O3(112̅0), Al2O3(11̅02), Al2O3(11̅00) and Al2O3 (0001) using two CVD processes with different boron precursors; triethylborane (TEB) and trimethylborane (TMB). Fourier transform infrared spectroscopy (FTIR) showed that sp2-BN grows on all the sapphire substrates, using X-ray diffraction (XRD), 2θ/ω diffractograms showed that only Al2O3(112̅0) and Al2O3(0001) renders crystalline films and using phi(ɸ)-scans the growth of rhombohedral polytype (r-BN) films on these substrates is confirmed. These films are found to be epitaxially grown on an AlN interlayer with a higher crystalline quality for the films grown on the Al2O3(112̅0) substrate which is determined using omega(ω)-scans. Our study suggests that Al2O3(112̅0) is the most favorable sapphire substrate to realize the envisioned applications of r-BN films.


thin films


Comments are not moderated before they are posted, but they can be removed by the site moderators if they are found to be in contravention of our Commenting Policy [opens in a new tab] - please read this policy before you post. Comments should be used for scholarly discussion of the content in question. You can find more information about how to use the commenting feature here [opens in a new tab] .
This site is protected by reCAPTCHA and the Google Privacy Policy [opens in a new tab] and Terms of Service [opens in a new tab] apply.