Thermal Ranges and Figures of Merit for Gold-Containing Precursors For ALD

Abstract

A survey of known gold-containing chemical vapour deposition (CVD) and atomic layer deposition (ALD) precursors, with a focus on collecting their volatilization and decomposition data. These data were applied to a figure of merit (σ) developed to easily assess the thermal characteristics.

Content

Supplementary material

gold review-supp final