Inorganic Chemistry

Thermal Ranges and Figures of Merit for Gold-Containing Precursors For ALD

Authors

Abstract

A survey of known gold-containing chemical vapour deposition (CVD) and atomic layer deposition (ALD) precursors, with a focus on collecting their volatilization and decomposition data. These data were applied to a figure of merit (σ) developed to easily assess the thermal characteristics.

Content

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Supplementary material

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gold review-supp final