Thermal Ranges and Figures of Merit for Gold-Containing Precursors For ALD

Matthew Griffiths; Zachary Dubrawski; Peter Gordon; Marcel Junige; Sean Barry

doi:10.26434/chemrxiv.13077386.v1

Inorganic Chemistry

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Thermal Ranges and Figures of Merit for Gold-Containing Precursors For ALD

Working Paper

Matthew Griffiths ,
Zachary Dubrawski ,
Peter Gordon ,
Marcel Junige ,
Sean Barry Carleton University

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Abstract

A survey of known gold-containing chemical vapour deposition (CVD) and atomic layer deposition (ALD) precursors, with a focus on collecting their volatilization and decomposition data. These data were applied to a figure of merit (σ) developed to easily assess the thermal characteristics.