ChemRxiv
These are preliminary reports that have not been peer-reviewed. They should not be regarded as conclusive, guide clinical practice/health-related behavior, or be reported in news media as established information. For more information, please see our FAQs.
1/1
2 files

Kinetic Modeling of Ammonia Decomposition at CVD Conditions

preprint
submitted on 02.06.2020 and posted on 03.06.2020 by Karl Rönnby, Henrik Pedersen, Lars Ojamäe
Kinetic modeling has been used to study the decomposition chemistry of ammonia at a wide range of temperatures, pressures, concentrations, and carrier gases mimicking the conditions in chemical vapor deposition (CVD) of metal nitrides. The modeling show that only a small fraction of the ammonia molecules will decompose at most conditions studied. This suggests that the high NH3 to metal ratios often employed in CVD is due to the very low amount of reactive decomposition products rather than due to rapid decomposition of ammonia into stable dinitrogen and dihydrogen as suggested by purely thermodynamic models.

Funding

This project was funded by the Swedish foundation for Strategic Research through the project “Time-resolved low temperature CVD for III-nitrides” (SSF-RMA 15-0018). L.O. acknowledges financial support from the Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linköping University (Faculty Grant SFO Mat LiU no. 2009 00971).

History

Email Address of Submitting Author

henrik.pedersen@liu.se

Institution

Linkoping University

Country

Sweden

ORCID For Submitting Author

0000-0002-7171-5383

Declaration of Conflict of Interest

No conflicts to declare

Licence

Exports

Read the published paper

in Journal of Vacuum Science & Technology A

Logo branding

Licence

Exports