Search

Categories

Inorganic Chemistry

(1)

Materials Science

(1)

Content Types

Working Paper

(1)

Published Date

Over 3 years

(1)

Keywords

trimethyl indium

Authors

1 results in Keywords: trimethyl indium

Materials Science

Atomic Layer Deposition of InN Using Trimethylindium and Ammonia Plasma

Petro Deminskyi, Polla Rouf, Ivan G. Ivanov, Henrik Pedersen

Version 3 posted 28 January 2019

1,313

Downloads