Search

Categories

Inorganic Chemistry

(1)

Materials Science

(1)

Organometallic Chemistry

(1)

Physical Chemistry

(1)

Content Types

Working Paper

(1)

Published Date

Over 3 years

(1)

Keywords

triethylgallium

Authors

1 results in Keywords: triethylgallium

Physical Chemistry

Surface Ligand Removal in Atomic Layer Deposition of GaN Using Triethylgallium

Petro Deminskyi, Chih-Wei Hsu, Babak Bakhit, Polla Rouf, Henrik Pedersen

Version 1 posted 03 November 2020

319

Downloads