Category:
Physical Chemistry
,
Working Paper
, Title:
Simulated conformality of atomic layer deposition in lateral channels: the impact of the Knudsen number on the saturation profile characteristics
, Authors:
Christine Gonsalves, Jorge Velasco, Jihong Yim, Jänis Järvilehto, Ville Vuorinen, Riikka Puurunen
Version 1 posted 11 January 2024
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