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remote plasma assisted MOCVD

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1 results in Keywords: remote plasma assisted MOCVD

Materials Science

Low-temperature and ammonia-free epitaxy of GaN/AlGaN/GaN heterostructure

David Maria Tobaldi, Valentina Triminì, Arianna Cretì, Mauro Lomascolo, Stefano Dicorato, Maria Losurdo, Adriana Passaseo, Vittorianna Tasco

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