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2 results in Keywords: high-aspect-ratio

Physical Chemistry

Simulated conformality of atomic layer deposition in lateral channels: the impact of the Knudsen number on the saturation profile characteristics

Christine Gonsalves, Jorge Velasco, Jihong Yim, Jänis Järvilehto, Ville Vuorinen, Riikka Puurunen

Version 2 posted 01 October 2024

230

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Physical Chemistry

Conformality of atomic layer deposition in microchannels: impact of process parameters on the simulated thickness profile

Jihong Yim, Emma Verkama, Jorge Velasco, Karsten Arts, Riikka Puurunen

Version 3 posted 07 March 2022

479

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