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dry etching

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2 results in Keywords: dry etching

Materials Science

Zinc-Imidazolate Films as an All-Dry Resist Technology

Peter Corkery, Kayley Waltz, Patrick Eckhert, Mueed Ahmad, Andrea Kraetz, Yurun Miao, Dennis T. Lee, Mohammed K. Abdel-Rahman, Yucheng Lan, Paul Haghi-Ashtiani, Aaron Stein, J. Anibal Boscoboinik, Michael Tsapatsis, D. Howard Fairbrother

Version 1 posted 18 September 2023

765

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Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification

Berke Erbas, Ana Conde-Rubio, Xia Liu, Joffrey Pernollet, Zenyu Wang, Arnaud Bertsch, Marcos Penedo, Georg Fantner, Mitali Banerjee, Andras Kis, Giovanni Boero, Juergen Brugger

Version 1 posted 12 July 2023

532

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