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conformal

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2 results in Keywords: conformal

Materials Science

Superconformal silicon carbide coatings via precursor pulsed chemical vapor deposition

Jing-Jia Huang, Christian Militzer, Charles Wijayawardhana, Urban Forsberg, Henrik Pedersen

Version 1 posted 09 January 2023

230

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Materials Science

A Surface Inhibiting Effect in Chemical Vapor Deposition of Boron-Carbon Thin Films from Trimethylboron

Laurent Souqui, Hans Högberg, Henrik Pedersen

Version 2 posted 04 June 2019

712

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