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Materials Science

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Theoretical and Computational Chemistry

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Over 3 years

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TaN

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2 results in Keywords: TaN

Materials Science

Ru Passivated and Ru Doped e-TaN surfaces as Combined Barrier and Liner Material for Copper Interconnects: A First Principles Study

Suresh Natarajan, Cara-Lena Nies, Michael Nolan

Version 1 posted 06 December 2018

524

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Materials Science

The Role of Ru Passivation and Doping on the Barrier and Seed Layer Properties of Ru-Modiﬁed TaN for Copper Interconnects

Suresh Natarajan, Cara-Lena Nies, Michael Nolan

Version 1 posted 04 February 2020

443

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