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SiC

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3 results in Keywords: SiC

Materials Science

Controlled CVD growth of highly <111>-oriented 3C-SiC

Jing-Jia Huang, Christian Militzer, Charles Wijayawardhana, Urban Forsberg, Lars Ojamäe, Henrik Pedersen

Version 1 posted 23 February 2022

551

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Materials Science

Superconformal silicon carbide coatings via precursor pulsed chemical vapor deposition

Jing-Jia Huang, Christian Militzer, Charles Wijayawardhana, Urban Forsberg, Henrik Pedersen

Version 1 posted 09 January 2023

317

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Materials Science

Conformal and superconformal chemical vapor deposition of silicon carbide coatings

Jing-Jia Huang, Christian Militzer, Charles Wijayawardhana, Urban Forsberg, Henrik Pedersen

Version 1 posted 12 May 2022

331

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