Search

Categories

Inorganic Chemistry

(1)

Materials Science

(1)

Nanoscience

(1)

Physical Chemistry

(1)

Content Types

Working Paper

(1)

Published Date

Over 3 years

(1)

Keywords

MACE

Authors

1 results in Keywords: MACE

Materials Science

Metal-Assisted Plasma Etching of Silicon: A Liquid-Free Alternative to MACE

Julia Sun, Benjamin Almquist

Version 1 posted 12 April 2018

1,152

Downloads

1

Citations