Category:
Chemical Engineering and Industrial Chemistry
,
Working Paper
, Title:
Simulation of Conformality of ALD Growth Inside Lateral Channels: Comparison Between a Diffusion-Reaction Model and a Ballistic Transport-Reaction Model
, Authors:
Jänis Järvilehto, Jorge Velasco, Jihong Yim, Christine Gonsalves, Riikka Puurunen
Version 2 posted 20 July 2023
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