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Film Growth Mechanism

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Inorganic Chemistry

Cobalt Metal ALD: Understanding the Mechanism and Role of Zink Alkyl Precursors as Reductants for Low Resistivity Co Thin Films

David Zanders, Ji Liu, Jorit Obenlüneschloß, Claudia Bock, Detlef Rogalla, Lukas Mai, Michael Nolan, Sean Barry, Anjana Devi

Version 1 posted 16 March 2021

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