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5 results in Keywords: Conformality

Chemical Engineering and Industrial Chemistry

Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels

Jihong Yim, Oili Ylivaara, Markku Ylilammi, Virpi Korpelainen, Eero Haimi, Emma Verkama, Mikko Utriainen, Riikka Puurunen

Version 4 posted 23 September 2020

1,368

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Chemical Engineering and Industrial Chemistry

Simulation of Conformality of ALD Growth Inside Lateral Channels: Comparison Between a Diffusion-Reaction Model and a Ballistic Transport-Reaction Model

Jänis Järvilehto, Jorge Velasco, Jihong Yim, Christine Gonsalves, Riikka Puurunen

Version 2 posted 20 July 2023

191

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Chemical Engineering and Industrial Chemistry

Atomic layer deposition of zinc oxide on mesoporous zirconia using zinc(II) acetylacetonate and air

Jihong Yim, Eero Haimi, Miia Mäntymäki, Vile Kärkäs, René Bes, Aitor Arandia Gutierrez, Kristoffer Meinander, Philipp Brüner, Thomas Grehl, Lars Gell, Tiia Viinikainen, Karoliina Honkala, Simo Huotari, Reetta Karinen, Matti Putkonen, Riikka L. Puurunen

Version 3 posted 01 September 2023

385

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Physical Chemistry

Simulated conformality of atomic layer deposition in lateral channels: the impact of the Knudsen number on the saturation profile characteristics

Christine Gonsalves, Jorge Velasco, Jihong Yim, Jänis Järvilehto, Ville Vuorinen, Riikka Puurunen

Version 2 posted 01 October 2024

230

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Physical Chemistry

Conformality of atomic layer deposition in microchannels: impact of process parameters on the simulated thickness profile

Jihong Yim, Emma Verkama, Jorge Velasco, Karsten Arts, Riikka Puurunen

Version 3 posted 07 March 2022

479

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