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Chemical Solution Deposition of HfO2

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Materials Chemistry

Low-toxicity Chemical Solution Deposition of Ferroelectric Ca:HfO2

Miguel Badillo, Sepide Taleb, Taraneh Mokabber, Jan Rieck, Rebeca Castanedo-Perez, Gerardo Torres-Delgado, Beatriz Noheda, Monica Acuautla

Version 2 posted 05 October 2022

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