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Area-selective atomic layer deposition

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2 results in Keywords: Area-selective atomic layer deposition

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Category: Theoretical and Computational Chemistry

An atomistic picture on build-up and degradation reactions in area-selective atomic layer deposition with a small molecule inhibitor

, Authors: Paul Philipp Wellmann, Fabian Pieck, Ralf Tonner-Zech

Version 1 posted 03 May 2024

198

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Category: Chemical Engineering and Industrial Chemistry

Crystalline 1D Coordination Polymer Inhibitor Layer Leads to Vertical Sidewalls in Selectively Deposited ZnO on Nanoscale Patterns

, Authors: Alexander Shearer, Yukio Cho, Miso Kim, Andreas Werbrouck, Tzu-Ling Liu, Chris Takacs, Bonggeun Shong, Stacey F Bent

Version 1 posted 12 December 2024

121

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ISSN 2573-2293 (Online) ChemRxiv Archive

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