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Patterning

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Category: Materials Chemistry

Electron-beam chemistry in graphene - Effect of environmental SEM parameters on patterning and defect engineering

, Authors: Ryan Selhorst, Michael Susner, Ryan Muzzio, I-Hsuan Kao, Jennifer Carpena-Nunez, Ahmad Islam, Jyoti Katoch, Benji Maruyama, Rahul Rao

Version 1 posted 16 August 2022

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Category: Materials Chemistry

Extreme Ultraviolet and Beyond Extreme Ultraviolet Lithography using Amorphous Zeolitic Imidazolate Resists Deposited by Atomic/Molecular Layer Deposition

, Authors: Kayley E Waltz, Xinpei Zhou, Xavier Krull, Somya Singh, Eric Mattson, Yurun Miao, Matt Hettermann, Travis Grodt, Qi Zhang, Honggu Im, Bernhard Lüttgenau, Lauren Doyle, Andrea Kraetz, Max Beutner, Scott B. Clendenning, D. Howard Fairbrother, Joseph T. Hupp, Patrick Naulleau, Lawrence Rooney, Oleg Kostko, Michael Tsapatsis

Version 1 posted 19 June 2025

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ISSN 2573-2293 (Online) ChemRxiv Archive

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