Category:
Inorganic Chemistry
, Title:
Atomic-Scale Structure and its Impact on Chemical Properties of Aluminum Oxide Layers Prepared by Atomic Layer Deposition on Silica
, Authors:
Monu Kaushik, César Leroy, Zixuan Chen, David Gajan, Elena Willinger, Christoph Müller, Franck Fayon, Dominique Massiot, Alexey Fedorov, Christophe Copéret, Anne Lesage, Pierre Florian