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Yucheng Lan

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Materials Science

Zinc-Imidazolate Films as an All-Dry Resist Technology

Peter Corkery, Kayley Waltz, Patrick Eckhert, Mueed Ahmad, Andrea Kraetz, Yurun Miao, Dennis T. Lee, Mohammed K. Abdel-Rahman, Yucheng Lan, Paul Haghi-Ashtiani, Aaron Stein, J. Anibal Boscoboinik, Michael Tsapatsis, D. Howard Fairbrother

Version 1 posted 18 September 2023

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