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Suresh Natarajan

4 results in Authors: Suresh Natarajan

Materials Science

Mechanism of the HF Pulse in the Thermal Atomic Layer Etch of HfO2 and ZrO2: A First Principles Study

Rita Mullins, Suresh Natarajan, Simon D. Elliott, Michael Nolan

Version 1 posted 12 December 2019

768

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Materials Science

Ru Passivated and Ru Doped e-TaN surfaces as Combined Barrier and Liner Material for Copper Interconnects: A First Principles Study

Suresh Natarajan, Cara-Lena Nies, Michael Nolan

Version 1 posted 06 December 2018

497

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Materials Science

The Role of Ru Passivation and Doping on the Barrier and Seed Layer Properties of Ru-Modiﬁed TaN for Copper Interconnects

Suresh Natarajan, Cara-Lena Nies, Michael Nolan

Version 1 posted 04 February 2020

394

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Materials Chemistry

Control of Cu morphology on Ru-passivated and Ru-doped TaN Surfaces – promoting growth of 2D conducting copper for CMOS interconnects

Cara-Lena Nies, Suresh Kondati Natarajan, Michael Nolan

Version 1 posted 23 August 2021

154

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