Category:
Inorganic Chemistry
,
Working Paper
, Title:
Cobalt Metal ALD: Understanding the Mechanism and Role of Zink Alkyl Precursors as Reductants for Low Resistivity Co Thin Films
, Authors:
David Zanders, Ji Liu, Jorit Obenlüneschloß, Claudia Bock, Detlef Rogalla, Lukas Mai, Michael Nolan, Sean Barry, Anjana Devi
Version 1 posted 16 March 2021
675
Downloads