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Physical Chemistry

Working Paper

On the limitations of thermal atomic layer deposition of InN using ammonia

Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 06 December 2022

137

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Theoretical and Computational Chemistry

Working Paper

Thermal Decomposition of Trimethylindium and Indium Trisguanidinate Precursors for InN Growth: An Ab-Initio and Kinetic Modelling Study

Giane Damas, Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 28 February 2023

183

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Organometallic Chemistry

Working Paper

The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling ALD of InN Films

Polla Rouf, Nathan J O'Brien, Karl Rönnby, Rouzbeh Samii, Ivan G. Ivanov, Lars Ojamäe, Henrik Pedersen

Version 1 posted 19 June 2019

426

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Inorganic Chemistry

Working Paper

Hexacoordinated Gallium(III) Triazenide Precursor for Epitaxial Gallium Nitride by Atomic Layer Deposition

Polla Rouf, Rouzbeh Samii, Karl Rönnby, Babak Bakhit, Sydney Buttera, Ivan Martinovic, Lars Ojamäe, Chih-Wei Hsu, Justinas Palisaitis, Vadim Kessler, Henrik Pedersen, Nathan O'Brien

Version 1 posted 05 November 2020

392

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1

Citations

Physical Chemistry

Working Paper

Kinetic Modeling of Ammonia Decomposition at CVD Conditions

Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 03 June 2020

1,046

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Inorganic Chemistry

Working Paper

Methylamines as Nitrogen Precursors in Chemical Vapor Deposition of Gallium Nitride

Karl Rönnby, Sydney C. Buttera, Polla Rouf, Sean Barry, Lars Ojamäe, Henrik Pedersen

Version 3 posted 21 January 2019

1,216

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Inorganic Chemistry

Working Paper

In-situ Activation of a Highly Volatile and Thermally Stable Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition

Nathan O'Brien, Polla Rouf, Rouzbeh Samii, Karl Rönnby, Sydney C. Buttera, Ivan G. Ivanov, Vadim Kessler, Lars Ojamäe, Henrik Pedersen

Version 1 posted 28 November 2019

516

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Physical Chemistry

Working Paper

Surface structures from NH3 chemisorption in CVD and ALD of AlN, GaN and InN films

Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 24 January 2022

203

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8 results in Karl Rönnby in Authors: Karl Rönnby

On the limitations of thermal atomic layer deposition of InN using ammonia

Thermal Decomposition of Trimethylindium and Indium Trisguanidinate Precursors for InN Growth: An Ab-Initio and Kinetic Modelling Study

The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling ALD of InN Films

Hexacoordinated Gallium(III) Triazenide Precursor for Epitaxial Gallium Nitride by Atomic Layer Deposition

Kinetic Modeling of Ammonia Decomposition at CVD Conditions

Methylamines as Nitrogen Precursors in Chemical Vapor Deposition of Gallium Nitride

In-situ Activation of a Highly Volatile and Thermally Stable Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition

Surface structures from NH3 chemisorption in CVD and ALD of AlN, GaN and InN films

8 results in Authors: Karl Rönnby