Category:
Organometallic Chemistry
,
Working Paper
, Title:
Mechanistic study of the atomic layer deposition of cobalt: A combined mass spectrometric and computational approach
, Authors:
Sofia Donnecke, Mathias Paul, Serena Chan, Veronica Tse, Jigyasa Sachdeva, Peter J. H. Williams, Allen G. Oliver, Irina Paci, J. Scott McIndoe
Version 4 posted 16 October 2023
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