Category:
Inorganic Chemistry
,
Working Paper
, Title:
The Importance of Decarbonylation Mechanisms in the Atomic Layer Deposition of High-Quality Ru Films by Zero-Oxidation State Ru(DMBD)(CO)3
, Authors:
Joel Schneider, Camila de Paula, Jacqueline Lewis, Jacob Woodruff, James Raiford, Stacey Bent
Version 1 posted 14 September 2021
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