Category:
Materials Science
,
Working Paper
, Title:
Area-Selective Atomic Layer Deposition of Noble Metals: Polymerized Fluorocarbon Layers as Effective Growth Inhibitors
, Authors:
Petro Deminskyi, Ali Haider, Hamit Eren, Talha Masood Khan, Necmi Biyikli
Version 3 posted 22 July 2019
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