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Fabian Pieck

2 results in Authors: Fabian Pieck

Theoretical and Computational Chemistry

Accurately computed dimerization fraction of ALD precursors and their impact on surface reactivity in area-selective atomic layer deposition

Patrick Maue, Émilie Chantraine, Fabian Pieck, Ralf Tonner-Zech

Version 1 posted 22 August 2024

189

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Theoretical and Computational Chemistry

An atomistic picture on build-up and degradation reactions in area-selective atomic layer deposition with a small molecule inhibitor

Paul Philipp Wellmann, Fabian Pieck, Ralf Tonner-Zech

Version 1 posted 03 May 2024

177

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