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Eero Haimi

3 results in Authors: Eero Haimi

Chemical Engineering and Industrial Chemistry

Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels

Jihong Yim, Oili Ylivaara, Markku Ylilammi, Virpi Korpelainen, Eero Haimi, Emma Verkama, Mikko Utriainen, Riikka Puurunen

Version 4 posted 23 September 2020

1,368

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Materials Science

Nickel Supported on Mesoporous Zirconium Oxide by Atomic Layer Deposition: Initial Fixed-Bed Reactor Study

Riikka Puurunen, Pauline Voigt, Eero Haimi, Jouko Lahtinen, You Wayne Cheah, Eveliina Mäkelä, Tiia Viinikainen

Version 2 posted 05 December 2018

1,261

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Chemical Engineering and Industrial Chemistry

Atomic layer deposition of zinc oxide on mesoporous zirconia using zinc(II) acetylacetonate and air

Jihong Yim, Eero Haimi, Miia Mäntymäki, Vile Kärkäs, René Bes, Aitor Arandia Gutierrez, Kristoffer Meinander, Philipp Brüner, Thomas Grehl, Lars Gell, Tiia Viinikainen, Karoliina Honkala, Simo Huotari, Reetta Karinen, Matti Putkonen, Riikka L. Puurunen

Version 3 posted 01 September 2023

385

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