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Christine Gonsalves

2 results in Authors: Christine Gonsalves

Physical Chemistry

Simulated conformality of atomic layer deposition in lateral channels: the impact of the Knudsen number on the saturation profile characteristics

Christine Gonsalves, Jorge Velasco, Jihong Yim, Jänis Järvilehto, Ville Vuorinen, Riikka Puurunen

Version 2 posted 01 October 2024

285

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Chemical Engineering and Industrial Chemistry

Simulation of Conformality of ALD Growth Inside Lateral Channels: Comparison Between a Diffusion-Reaction Model and a Ballistic Transport-Reaction Model

Jänis Järvilehto, Jorge Velasco, Jihong Yim, Christine Gonsalves, Riikka Puurunen

Version 2 posted 20 July 2023

275

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