Category:
Inorganic Chemistry
,
Working Paper
, Title:
Atomic-Scale Structure and its Impact on Chemical Properties of Aluminum Oxide Layers Prepared by Atomic Layer Deposition on Silica
, Authors:
Monu Kaushik, César Leroy, Zixuan Chen, David Gajan, Elena Willinger, Christoph Müller, Franck Fayon, Dominique Massiot, Alexey Fedorov, Christophe Copéret, Anne Lesage, Pierre Florian
Version 1 posted 22 January 2021
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