Category:
Materials Science
,
Working Paper
, Title:
Optimizing and Understanding amorphous SiN Thin Film Deposition for GaN-HEMTs using Machine Learning and Causal Discovery
, Authors:
Kenji Homma, Akito Maruo, Sotaro Kuribayashi, Hiroyuki Higuchi, Hideyuki Jippo, Atsushi Yamada, Toshihiro Ohki
Version 1 posted 25 March 2025
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