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Arnaud Bertsch

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Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification

Berke Erbas, Ana Conde-Rubio, Xia Liu, Joffrey Pernollet, Zenyu Wang, Arnaud Bertsch, Marcos Penedo, Georg Fantner, Mitali Banerjee, Andras Kis, Giovanni Boero, Juergen Brugger

Version 1 posted 12 July 2023

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