Category:
Materials Science
,
Working Paper
, Title:
Zinc-Imidazolate Films as an All-Dry Resist Technology
, Authors:
Peter Corkery, Kayley Waltz, Patrick Eckhert, Mueed Ahmad, Andrea Kraetz, Yurun Miao, Dennis T. Lee, Mohammed K. Abdel-Rahman, Yucheng Lan, Paul Haghi-Ashtiani, Aaron Stein, J. Anibal Boscoboinik, Michael Tsapatsis, D. Howard Fairbrother
Version 1 posted 18 September 2023
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