Category:
Materials Science
,
Working Paper
, Title:
Atomic Layer Deposition of LiF and Lithium Ion Conducting (AlF3)(LiF)x Alloys Using Trimethylaluminum, Lithium Hexamethyldisilazide and Hydrogen Fluoride
, Authors:
Younghee Lee, Daniela M. Piper, Andrew S. Cavanagh, Matthias J. Young, Se-Hee Lee, Steven M. George
Version 1 posted 03 October 2017
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