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Alex Moberg Byam

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Category: Physical Chemistry

Surface chemistry in Atomic Layer Deposition of Gallium Nitride from Triethylgallium and Ammonia studied by mass spectroscopy

, Authors: Houyem Hafdi, Pamburayi Mpofu, Alex Moberg Byam, Henrik Pedersen

Version 1 posted 25 November 2024

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ISSN 2573-2293 (Online) ChemRxiv Archive

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