Workflow and Practical Guidance for Identical Location Scanning Electron Microscopy: Reliable Tracking of Localized Transformations

Understanding and controlling material transformations at the nano- and microscale is vital for advancing technologies that depend on materials with complex, multiscale architectures, such as those used in electrocatalysis, energy storage, and other functional nanomaterials. While conventional scanning electron microscopy (SEM) offers valuable structural information, it typically images random locations before and after treatment, making it difficult to discern true transformations from natural sample heterogeneity. Identical location SEM (IL-SEM) overcomes this limitation by enabling precise re-imaging of the same nanoscale region, thereby providing definitive evidence of structural evolution. When applied through a well-defined protocol, it offers unmatched access to morphology, microstructure, and local composition changes. Despite its simplicity and unique potential for visualizing dynamic material behavior, IL-SEM remains underutilized. Therefore, this article presents a comprehensive guide for the practical implementation of IL-SEM, outlining step-by-step procedures and key considerations to ensure reliable application. We highlight its methodological advantages, identify common challenges, and offer practical solutions. To illustrate IL-SEM’s potential, we showcase representative case studies focused on the dynamic restructuring of various electrocatalysts, including supported nanoparticles and bulk alloys. By providing an optimized workflow and actionable tips, this work positions IL-SEM as a powerful tool for uncovering transformation mechanisms and accelerating progress across materials research disciplines beyond electrocatalysis.