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Abstract
We propose a process for decomposing and removing vacuum-compatible heat-resistant epoxy resins adhered to vacuum components by alkali fusion. We demonstrated the reworking of Al2O3 substrates with printed electrode patterns from the worn-out qPlus sensors using KOH-NaOH eutectic melt under atmospheric pressure. The substrate was reworked with minimal oxidation damage to the circuit pattern at a heating temperature of 510 °C and duration of 5 min. The proposed method is an efficient removal technique for vacuum-compatible heat-resistant epoxy resins that can be performed at the laboratory level without special reagents or equipment. It enables reworking a wide range of vacuum components sufficiently resistant to the alkali melt.
Supplementary materials
Title
Supplementary Material
Description
S1. SEM-EDX elemental composition analysis of epoxy adhesives H74, H20E and H70E.
S2. SEM-EDX analyses of microstructure and chemical composition on the Al2O3 substrate surface before and after reworking process.
S3. Thermal vibration spectra measurement and AFM experiment using the refabricated sensors.
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