(001)-oriented Sr:HfO2 ferroelectric films deposited by a flexible chemical solution method

22 November 2023, Version 1
This content is a preprint and has not undergone peer review at the time of posting.


Remnant polarization values of ferroelectric HfO2-based films depend on proper control of polar orthorhombic phase crystallization and the orientation of the polar domains. Most of the best quality films reported so far are (111)-oriented. While the largest polarization is expected in (001)-oriented films, with the polar axis out of the plane, such orientation is far less common. This paper demonstrates that highly (001)/(010)-oriented heterostructures of Sr:HfO2 on Pt(111)-buffered Si, can be attained in layered films deposited by a newly reported chemical solution deposition route. The oriented films display the short c-axis out-of-plane, giving place to a longer a lattice in-plane. By tailoring the duration of rapid thermal processing, such oriented films produce highly ferroelectric, leakage-free capacitors. After wake-up cycling, a remnant polarization of 17 µC/cm2, which is the highest reported for this dopant and technique, was achieved. Even though optimization is still needed to improve the electrical cyclability, our facile approach produces high-k, highly oriented Sr:HfO2 films, through chemical deposition and annealing, and shows that crystal orientations and phase purity of HfO2-based films can be further optimized by cost-effective chemical methods.


(001)-oriented HfO2
ferroelectric hafnium oxide
phase transition

Supplementary materials

Supplementary material
Out-of-plane X-ray diffraction for Sr:HfO2/Pt/Ti/SiO2/Si stacks. (001)-oriented Sr:HfO2 grows on (111)-oriented Pt.


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